CMOS-compatible deposition of tunable crystalline SiGe composition on insulator (2016)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/cleo_si.2016.sf1p.3

Publication URI: http://dx.doi.org/10.1364/cleo_si.2016.sf1p.3

Type: Conference/Paper/Proceeding/Abstract