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Analysis of Silicon Germanium Standards for the Quantification of SiGe Microelectronic Devices Using AES (2015)

First Author: Mallinson C

Attributed to: CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/11.20141102

Publication URI: http://dx.doi.org/10.1116/11.20141102

Type: Journal Article/Review

Parent Publication: Surface Science Spectra

Issue: 1