A Simulation Study of the Temperature Sensitivity and Impact of Fabrication Tolerances on the Performance of a Geometric Anti-Spring Based MEMS Gravimeter (2022)
Attributed to:
Monolithic Silicon Photonics Interferometer for Ultra-sensitive MEMS Sensors
funded by
STFC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/inertial53425.2022.9787761
Publication URI: http://dx.doi.org/10.1109/inertial53425.2022.9787761
Type: Conference/Paper/Proceeding/Abstract