Polarized angle-resolved spectral reflectometry for real-time ultra-thin film measurement. (2023)

First Author: Wang J

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.481389

PubMed Identifier: 36823908

Publication URI: http://europepmc.org/abstract/MED/36823908

Type: Journal Article/Review

Volume: 31

Parent Publication: Optics express

Issue: 4

ISSN: 1094-4087