Two-Inch Wafer-Scale Exfoliation of Hexagonal Boron Nitride Films Fabricated by RF-Sputtering (2022)
Attributed to:
Monolithic On-chip Integration of Electronics & Photonics Using III-nitrides for Telecoms
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/adfm.202206094
Publication URI: http://dx.doi.org/10.1002/adfm.202206094
Type: Journal Article/Review
Parent Publication: Advanced Functional Materials
Issue: 38