Impact of strain-induced bow on the performance of VCSELs on 150mm GaAs- and Ge-substrate wafers (2022)
Attributed to:
Compound Semiconductor Underpinning Equipment
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/12.2624492
Publication URI: http://dx.doi.org/10.1117/12.2624492
Type: Conference/Paper/Proceeding/Abstract