Modelling of a shear-type piezoelectric actuator for AFM-based vibration-assisted nanomachining (2023)
Attributed to:
Novel Instrumentation for High-Speed AFM-based Nano Machining
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.ijmecsci.2022.108048
Publication URI: http://dx.doi.org/10.1016/j.ijmecsci.2022.108048
Type: Journal Article/Review
Parent Publication: International Journal of Mechanical Sciences