Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition (2023)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2023.139781

Publication URI: http://dx.doi.org/10.1016/j.tsf.2023.139781

Type: Journal Article/Review

Parent Publication: Thin Solid Films