Recent development and futuristic applications of MEMS based piezoelectric microphones (2022)

First Author: Kumar A
Attributed to:  Integration of RF Circuits with High Speed GaN Switching on Silicon Substrates funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.sna.2022.113887

Publication URI: http://dx.doi.org/10.1016/j.sna.2022.113887

Type: Journal Article/Review

Parent Publication: Sensors and Actuators A: Physical