High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range. (2020)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/ol.396356
PubMed Identifier: 32735269
Publication URI: http://europepmc.org/abstract/MED/32735269
Type: Journal Article/Review
Volume: 45
Parent Publication: Optics letters
Issue: 15
ISSN: 0146-9592