Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography (2022)
Attributed to:
Manufacturing at the 7nm node and beyond enabled by novel resist technology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/1.jmm.21.4.041404
Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85147548058
Type: Journal Article/Review
Parent Publication: Journal of Micro/Nanopatterning, Materials, and Metrology
Issue: 04