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Development of a compact focus variation microscopy sensor for on-machine surface topography measurement (2022)

First Author: Santoso T

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.measurement.2021.110311

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85117892758

Type: Journal Article/Review

Parent Publication: Measurement