The Improved Reliability Performance of Post-Deposition Annealed ALD-SiO<sub>2</sub> (2022)

First Author: Renz A
Attributed to:  Underpinning Power Electronics switch optimisation Theme funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.4028/p-b76y6c

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85134265626

Type: Journal Article/Review

Parent Publication: Materials Science Forum