Ion implantation in silicon for photonic device trimming (2017)
Attributed to:
CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85059520219
Type: Other
Volume: Part F122-CLEOPR 2017
Parent Publication: Optics InfoBase Conference Papers
ISSN: 21622701