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Ion implantation in silicon for photonic device trimming (2017)

First Author: Milosevic M.M.

Attributed to: CORNERSTONE: Capability for OptoelectRoNics, mEtamateRialS, nanoTechnOlogy aNd sEnsing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85059520219

Type: Other

Volume: Part F122-CLEOPR 2017

Parent Publication: Optics InfoBase Conference Papers

ISSN: 21622701