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Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography (2023)

First Author: Bekker C

Attributed to: Two-dimensional Photonics Fabrication Facility funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0144684

Publication URI: http://dx.doi.org/10.1063/5.0144684

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 17