Towards Superresolution Surface Metrology: Quantum Estimation of Angular and Axial Separations. (2019)
Attributed to:
Metrology for precision and additive manufacturing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1103/physrevlett.122.140505
PubMed Identifier: 31050483
Publication URI: http://europepmc.org/abstract/MED/31050483
Type: Journal Article/Review
Volume: 122
Parent Publication: Physical review letters
Issue: 14
ISSN: 0031-9007