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Quantitative dopant contrast in the helium ion microscope (2009)

First Author: Jepson M

Attributed to: Quantitative, high resolution two-and-three dimensional dopant mapping in the Scanning Electron Microscope by Secondary Electron Spectro-Micro funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1209/0295-5075/86/26005

Publication URI: http://dx.doi.org/10.1209/0295-5075/86/26005

Type: Journal Article/Review

Parent Publication: EPL (Europhysics Letters)

Issue: 2