Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography (2023)

First Author: Bekker C
Attributed to:  MOSQUITO: MObile Spin-based QUantum Information sTOrage funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0144684

Publication URI: http://dx.doi.org/10.1063/5.0144684

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 17