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Vibration compensating beam scanning interferometer for surface measurement (2008)

First Author: Martin H

Attributed to: A chip device for on-line assessment in nano-scale surface manufacture funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.47.000888

PubMed Identifier: 18311259

Publication URI: http://europepmc.org/abstract/MED/18311259

Type: Journal Article/Review

Parent Publication: Applied Optics

Issue: 7

ISSN: 1559-128X