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Secondary ion mass spectrometry analysis of metal oxides using 70 keV argon, carbon dioxide, and water gas cluster ion beams (2023)

First Author: Alsaedi A

Attributed to: Development of Multiplexed ToF-SIMS Instrumentation funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/6.0002591

Publication URI: http://dx.doi.org/10.1116/6.0002591

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B

Issue: 4