A Capacitive Humidity Sensor Suitable for CMOS Integration (2013)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jsen.2013.2270105
Publication URI: http://dx.doi.org/10.1109/jsen.2013.2270105
Type: Journal Article/Review
Parent Publication: IEEE Sensors Journal
Issue: 11