Bismuth trichloride as a molecular precursor for silicon doping (2023)
Attributed to:
Atomically Deterministic Doping and Readout For Semiconductor Solotronics (ADDRFSS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0145772
Publication URI: http://dx.doi.org/10.1063/5.0145772
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 15