Large-area synthesis of high electrical performance MoS2 by a commercially scalable atomic layer deposition process (2023)

First Author: Aspiotis N

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41699-023-00379-z

Publication URI: http://dx.doi.org/10.1038/s41699-023-00379-z

Type: Journal Article/Review

Parent Publication: npj 2D Materials and Applications

Issue: 1