Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon. (2023)
Attributed to:
EPRSC Resource Only Strategic Equipment: the Warwick Analytical Science Centre
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/d3nr01374j
PubMed Identifier: 37284742
Publication URI: http://europepmc.org/abstract/MED/37284742
Type: Journal Article/Review
Volume: 15
Parent Publication: Nanoscale
Issue: 25
ISSN: 2040-3364