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Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon (2023)

First Author: Pain S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/d3nr01374j

PubMed Identifier: 37284742

Publication URI: http://europepmc.org/abstract/MED/37284742

Type: Journal Article/Review

Parent Publication: Nanoscale

Issue: 25

ISSN: 2040-3364