Comparative investigation of anisotropic etches for polysilicon nanowire definition in thin film technology (2023)

First Author: Hakim M
Attributed to:  Silicon Nanowire Arrays for Viral Infection Markers funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2631-8695/acc310

Publication URI: http://dx.doi.org/10.1088/2631-8695/acc310

Type: Journal Article/Review

Parent Publication: Engineering Research Express

Issue: 1