Foundry SiN as a platform for Heterogeneous Integration at Visible Wavelengths (2023)

First Author: Smith J
Attributed to:  Zero-change manufacturing of photonic interconnects for silicon electronics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/sum57928.2023.10224480

Publication URI: http://dx.doi.org/10.1109/sum57928.2023.10224480

Type: Conference/Paper/Proceeding/Abstract