Ultrathin superconducting TaCxN1-x films prepared by plasma-enhanced atomic layer deposition with ion-energy control (2023)
Attributed to:
Empowering Practical Interfacing of Quantum Computing (EPIQC)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0169339
Publication URI: http://dx.doi.org/10.1063/5.0169339
Type: Journal Article/Review
Parent Publication: Applied Physics Letters
Issue: 13