Ultrathin superconducting TaCxN1-x films prepared by plasma-enhanced atomic layer deposition with ion-energy control (2023)

First Author: Peeters S
Attributed to:  Single Photons - Expanding the Spectrum (SPEXS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0169339

Publication URI: http://dx.doi.org/10.1063/5.0169339

Type: Journal Article/Review

Parent Publication: Applied Physics Letters

Issue: 13