High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature. (2023)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acsphotonics.3c00968
PubMed Identifier: 37869559
Publication URI: http://europepmc.org/abstract/MED/37869559
Type: Journal Article/Review
Volume: 10
Parent Publication: ACS photonics
Issue: 10
ISSN: 2330-4022