High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature. (2023)

First Author: Lopez-Rodriguez B

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acsphotonics.3c00968

PubMed Identifier: 37869559

Publication URI: http://europepmc.org/abstract/MED/37869559

Type: Journal Article/Review

Volume: 10

Parent Publication: ACS photonics

Issue: 10

ISSN: 2330-4022