Porous silicon bulk acoustic wave resonator with integrated transducer. (2012)

First Author: Aliev GN

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1186/1556-276x-7-378

PubMed Identifier: 22776697

Publication URI: http://europepmc.org/abstract/MED/22776697

Type: Journal Article/Review

Volume: 7

Parent Publication: Nanoscale research letters

Issue: 1

ISSN: 1556-276X