Implementing Supervised and Unsupervised Deep-Learning Methods to Predict Sputtering Plasma Features, a Step toward Digitizing Sputter Deposition of Thin Films (2022)

First Author: Salimian A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3390/coatings12070953

Publication URI: http://dx.doi.org/10.3390/coatings12070953

Type: Journal Article/Review

Parent Publication: Coatings

Issue: 7