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High-uniformity atomic layer deposition of superconducting niobium nitride thin films for quantum photonic integration (2023)

First Author: Lennon C

Attributed to: Single Photons - Expanding the Spectrum (SPEXS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2633-4356/ad0aa5

Publication URI: http://dx.doi.org/10.1088/2633-4356/ad0aa5

Type: Journal Article/Review

Parent Publication: Materials for Quantum Technology

Issue: 4