High-uniformity atomic layer deposition of superconducting niobium nitride thin films for quantum photonic integration (2023)
Attributed to:
Single Photons - Expanding the Spectrum (SPEXS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/2633-4356/ad0aa5
Publication URI: http://dx.doi.org/10.1088/2633-4356/ad0aa5
Type: Journal Article/Review
Parent Publication: Materials for Quantum Technology
Issue: 4