A High-Resolution Versatile Focused Ion Implantation Platform for Nanoscale Engineering (2023)

First Author: Adshead M
Attributed to:  Sir Henry Royce Institute - Manchester and NNL Equipment funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/adem.202300889

Publication URI: http://dx.doi.org/10.1002/adem.202300889

Type: Journal Article/Review

Parent Publication: Advanced Engineering Materials

Issue: 22