Article (2023)

First Author: Acharya, R.
Attributed to:  Sir Henry Royce Institute - Manchester and NNL Equipment funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Publication URI: https://arxiv.org/abs/2308.12471v1

Type: Journal Article/Review

Volume: 1

Parent Publication: Highly 28Si Enriched Silicon by Localised Focused Ion Beam Implantation