📣 Help Shape the Future of UKRI's Gateway to Research (GtR)

We're improving UKRI's Gateway to Research and are seeking your input! If you would be interested in being interviewed about the improvements we're making and to have your say about how we can make GtR more user-friendly, impactful, and effective for the Research and Innovation community, please email gateway@ukri.org.

EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning (2024)

First Author: Constantinou P

Attributed to: Room-Temperature Single Atom Silicon Quantum Electronics funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41467-024-44790-6

Publication URI: http://dx.doi.org/10.1038/s41467-024-44790-6

Type: Journal Article/Review

Parent Publication: Nature Communications

Issue: 1