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Error compensation for form errors of plate beamsplitter in near optical coaxial phase measuring deflectometry with reflection error model (2023)

First Author: Gao F

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2686345

Publication URI: http://dx.doi.org/10.1117/12.2686345

Type: Conference/Paper/Proceeding/Abstract