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Modulated beam mass spectrometer studies of a Mark V Veeco cracker (2010)

First Author: Campion R

Attributed to: Investigation of growth kinetics and incorporation of impurities in group III-nitrides and group III-dilute nitrides using mass spectroscopy funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.3368573

Publication URI: http://dx.doi.org/10.1116/1.3368573

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 3

ISSN: 21662754 21662746