Modulated beam mass spectrometer studies of a Mark V Veeco cracker (2010)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.3368573
Publication URI: http://dx.doi.org/10.1116/1.3368573
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Issue: 3
ISSN: 21662754 21662746