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Hybrid Diamond/Silicon Suspended Integrated Photonic Platform using SF 6 Isotropic Etching (2019)

First Author: Panduranga P

Attributed to: Light Actuated Microrobots funded by ISCF

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/bicop48819.2019.9059586

Publication URI: http://dx.doi.org/10.1109/bicop48819.2019.9059586

Type: Conference/Paper/Proceeding/Abstract