Imaging and Modeling C2 Radical Emissions from Microwave Plasma-Activated Methane/Hydrogen Gas Mixtures: Contributions from Chemiluminescent Reactions and Investigations of Higher-Pressure Effects and Plasma Constriction. (2021)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.jpca.1c01924
PubMed Identifier: 33966382
Publication URI: http://europepmc.org/abstract/MED/33966382
Type: Journal Article/Review
Volume: 125
Parent Publication: The journal of physical chemistry. A
Issue: 19
ISSN: 1089-5639