Physics-based virtual coherence scanning interferometer for surface measurement (2021)

First Author: Su R
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.37188/lam.2021.009

Publication URI: http://dx.doi.org/10.37188/lam.2021.009

Type: Journal Article/Review

Parent Publication: Light: Advanced Manufacturing

Issue: 2

ISSN: 28314093 26899620