Sub-micron-accuracy automated position and rotation registration method for transferred devices (2021)
Attributed to:
'Hetero-print': A holistic approach to transfer-printing for heterogeneous integration in manufacturing
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/ipc48725.2021.9592935
Publication URI: http://dx.doi.org/10.1109/ipc48725.2021.9592935
Type: Conference/Paper/Proceeding/Abstract