Focused electron beam deposited silicon dioxide derivatives for nano-electronic applications (2022)
Attributed to:
Atomically Deterministic Doping and Readout For Semiconductor Solotronics (ADDRFSS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mssp.2022.106736
Publication URI: http://dx.doi.org/10.1016/j.mssp.2022.106736
Type: Journal Article/Review
Parent Publication: Materials Science in Semiconductor Processing
ISSN: 13698001