Impact of thermal oxidation uniformity on 150 mm GaAs- and Ge-substrate VCSELs (2023)
Attributed to:
Compound Semiconductor Underpinning Equipment
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/acc040
Publication URI: http://dx.doi.org/10.1088/1361-6463/acc040
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 15
ISSN: 13616463 00223727