Low-Loss MIM Capacitor on Thick SiO 2 Dielectric for GaN-on-Si Substrates with Standard and Elevated Top Electrode Configurations (2023)
Attributed to:
Future Compound Semiconductor Manufacturing Hub
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.23919/eumc58039.2023.10290587
Publication URI: http://dx.doi.org/10.23919/eumc58039.2023.10290587
Type: Conference/Paper/Proceeding/Abstract