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Low-Loss MIM Capacitor on Thick SiO 2 Dielectric for GaN-on-Si Substrates with Standard and Elevated Top Electrode Configurations (2023)

First Author: Eblabla A

Attributed to: Future Compound Semiconductor Manufacturing Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.23919/eumc58039.2023.10290587

Publication URI: http://dx.doi.org/10.23919/eumc58039.2023.10290587

Type: Conference/Paper/Proceeding/Abstract