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Argon Cluster-Ion Sputter Yield: Molecular Dynamics Simulations on Silicon and an Equation for Estimating Total Sputter Yield (2017)

First Author: Cumpson P

Attributed to: University of Newcastle - Equipment Account funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.1710.00367

Publication URI: https://arxiv.org/abs/1710.00367

Type: Preprint