Resistless EUV lithography: photon-induced oxide patterning on silicon (2023)
Attributed to:
Atomically Deterministic Doping and Readout For Semiconductor Solotronics (ADDRFSS)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.2310.01268
Publication URI: https://arxiv.org/abs/2310.01268
Type: Other