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Influence of surface materials on the volume production of negative ions in a radio-frequency driven hydrogen plasma (2020)

First Author: Ellis J

Attributed to: Metrology concepts for a new generation of plasma manufacturing with atom-scale precision funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.2007.01098

Publication URI: https://arxiv.org/abs/2007.01098

Type: Preprint