Resistless EUV lithography: Photon-induced oxide patterning on silicon (2023)

First Author: Tseng, Li-Ting

Attributed to: Atomically Deterministic Doping and Readout For Semiconductor Solotronics (ADDRFSS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.3929/ethz-b-000609695

Publication URI: http://hdl.handle.net/20.500.11850/609695

Type: Other